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发帖数: 165 | 1 Two positions - Staff Thermal Engineering Architect and MTS, Tin Mitigation
Functional Architect.
Staff Thermal Engineering Architect
SUMMARY
For the development of novel thermal system solutions within our EUV plasma
chamber Mechanical Engineering team, we are seeking an experienced and
creative Staff Thermal Engineering Architect. Help us to develop well
engineered thermal architectures based on advanced FEA modeling and
instrumentation to enhance our tin capture and removal systems and provide
protection for our critical optics.
In our application, tin droplets are the fuel used to generate plasma
resulting in EUV light. Our unique application requires advanced thermal
architectures within our plasma chamber to incorporate well-engineered,
fully-integrated tin containment solutions.
The preferred candidate will perform a variety of engineering architect
functions related to thermal system designs that will guide the direction of
our EUV technology. Responsibilities include path-finding, defining trade
studies, completing feasibility analysis and defining the extensibility and
risks of the chosen design. The Thermal Architect will also work with the
hardware design team to define the functional requirements and ensure that
the design intent is carried within the product to the field.
DUTIES AND RESPONSIBILITIES
• Leads the development of the thermal architecture within the
plasma chamber to address tin management and optics protection; assist in
developing the product roadmap with the function owner and tin management
architect.
• Contribute as the thermal science domain expert to apply thermal
system design analysis and validation techniques to achieve robust tin
management and optics protection solutions. Assist in defining functional
requirements, driving CFD analysis, completing trade studies and driving the
design selection process.
• Establishes the thermal system design requirements in concert
with vacuum and gas flow system requirements. Audits the resulting designs
and analyses of the engineering team to verify fulfillment of the
requirements.
• Works closely with cross-functional groups to understand the
current product issues and develop integrated solutions. Engages engineers
, scientists, worldwide customer support , manufacturing, marketing and
upper management to gain alignment and drive the implementation of thermal
design solutions.
• Participate in the development of patent applications.
QUALIFICATIONS
• Broad technical knowledge of all aspects of thermal designs,
including gas flow and vacuum performance. Knowledge of metallurgical
deposition is a plus.
• Able to identify key supporting technologies related to optics
protection; help to identify project plans, priorities, risks and activities
.
• Experience with complex thermal system design and analysis, with
emphasis on the tin capture and removal process and optics protection.
Experience with semiconductor capital equipment tool development is
preferred.
• Ability to cross functional boundaries to build relationships
within all areas in the company, to understand and reconcile higher level
requirements and drive successful design implementation.
• Demonstrated ability to drive a product design from concept
through validation test and into production.
• Working knowledge of robust engineering principles, DFX and DOE
methodologies.
• Excellent written and verbal communication skills.
SKILLS/EXPERIENCE
• Requires a Master’s Degree in Mechanical, Physics, or Material
Science and a minimum of six (6) years of relevant experience; or a Ph.D.
and a minimum of four (4) years of relevant experience
• A minimum of four years of experience in plasma chamber thermal
technologies and system design.
• Experience with semiconductor gas and vacuum systems for capital
equipment is preferred.
• Experience with contamination and cleanroom standards is
preferred.
PHYSICAL DEMANDS AND WORK ENVIRONMENT
• Requires working with a firing laser on a frequent basis with
associated safety protocols.
• Requires working in a manufacturing clean room environment.
• May require travel dependent on business needs.
MTS, Tin Mitigation Functional Architect
Summary
LPP EUV is generated by firing high energy laser pulses at Tin droplet
targets at repetition rates beyond 100 KHz. The resulting plasma pulses
create both desired EUV light, and undesired Tin debris in the form of
ballistic particulates and atomic vapor. If unabated, the Tin debris will
coat all surfaces in the vessel, including optical components, impacting the
transmission of EUV and Laser light. The role of the Tin Mitigation
Functional Architect is to identify technologies and design concepts that
can be developed to address the undesired Tin debris. The successful
candidate will be a highly motivated and enthusiastic individual with a
broad technical background, excellent communication skills, and ability to
influence others. As a Functional Architect you will work with a team of
highly professional engineers and scientists with diverse academic
backgrounds and many years of experience. Your job is to provide technical
leadership the team to deliver practical solutions to enable this complex
function. You will perform a variety of engineering work including designing
, developing, testing, analyzing, troubleshooting and implementing. You will
provide technical skills during research and/or product development.
Responsibilities
• Develops the roadmap, requirements, specifications, architecture,
and technology development needs for Tin Management in the EUV Source,
which is required to improve optics lifetime, and overall system
availability
• Identifies concepts that can address performance gaps; assesses
technology maturity and defines the development and engineering work
breakdown for execution by cross-functional teams of seasoned scientists and
engineers
• Works with competence experts to develop and validate a model for
Tin loading in the EUV Source vessel, which can be used to predict
performance and issues, and drive the development roadmap
• Leads architecture and prototyping definition; works with cross-
functional teams of mechanical engineers, materials scientists, optical,
electrical and software engineers to develop solutions to roadmap
• Develops and maintains the specification document tree; writes
and/or reviews key specification and design documentation, coordinates key
reviews with Systems Engineering and Project Stakeholders to ensure
functional specifications are aligned to system requirements
• Identifies and engages third parties for development of
technology solutions; Creates Statements of Work (SOWs) to define phased
deliverables for budgeting and project management
• Defines Test Protocols; analyzes test data; makes recommendations
based on test results for design changes and operational changes to deliver
improved performance of sub-modules
• Serves as a seasoned professional who applies, analyzes, and
interprets a variety of standard theories, concepts, methods, and techniques
to a wide range of issues over multiple variables within a single technical
area using imaginative as well as practical solutions.
• Analyzes system performance against requirements, and documents
results.
• Audits fully the designs and analyses of other team members.
• Leads the development of basic design parameters and architecture
, and will carry a design from the conceptual stage through implementation
and deployment.
• Works closely with cross-functional groups (engineers and
scientists, worldwide customer support personnel, manufacturing personnel,
upper management, marketing, external customers). Crosses functional
boundaries and builds constructive and effective relationships throughout
the whole organization.
• Documents resultant designs with written theory of operation
descriptions, procedures, and training materials.
• Analyzes and communicates customer needs and reconciles these
with management needs.
• Oversees transition of new designs to Software Development,
including assessment of technical risk and feedback on qualification testing
plan.
• Acquires test data according to a loosely defined test protocol.
Modifies protocol in cooperation with scientists as necessary to ensure
success of tests, and creates detailed test plans.
• Interacts with customers as primary technical spokesperson on
relevant technical issues
• Participates in development of patent applications.
QUALIFICATIONS
• Has led a successfully completed project.
• Ability to carry a product design from conception into production.
• Project Engineering experience including leading small technical
teams.
• Ability to design and analyze feedback control systems using
classical, modern or nonlinear techniques and theories.
• Ability to cross functional boundaries to build relationships
with all areas in the company, to understand and reconcile higher level
company and customer needs.
• Experience designing practical feedback control systems of
significant complexity
• Knowledge of modern control theory, stochastics, and some
nonlinear control theory.
• Excellent knowledge of and experience with Matlab.
• Good knowledge of Power Spectral Density (PSD) analysis.
• Some experience with System Identification.
• Working knowledge of C/C++ desirable.
• Understanding of embedded software systems desirable.
Skills/Experience
• Requires a Master’s Degree in Engineering, Physics or related
technical discipline and a minimum of fifteen (15) years of experience in a
technical leadership role or a PhD and a minimum of twelve (12) years of
experience in a technical leadership role.
• A minimum of five (5) years of experience as a project lead.
• Semiconductor processing or equipment design a strong plus.
• Experience with project planning and execution.
• Experience with Excimer Lasers desired.
• Experience with any Lithographic systems a plus.
Personal Skills
• Passion for commercialization and driving innovation at a rapid
pace
• Highly motivated, enthusiast, flexible and a good communicator
• Think broad, learn fast, take responsibility, act decisively and
show critical sense
• Experience with product lifecycle management, including roadmap
definition
• Ability to initiate, influence and drive
• Physical Demands and Work Environment
• The environment generally is moderate in temperature and noise
level.
• Must be able to read and interpret data, information, and
documents.
• Can observe and respond to people and situations and interact
with others encountered in the course of work.
• Can learn and apply new information or skills.
• Requires working with a firing laser (which is noisy) on a
frequent basis.
• Requires working in a manufacturing clean room environment
occasionally.
• Requires working with Excimer lasers in noisy environments (
requiring ear protection) and potential radiation hazards (requiring eye and
skin protection). |
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