b********l
发帖数: 24 | 1 Could anyone help me get the following paper, thanks. Please email me at
l*******[email protected].
Anisotropic pattern transfer of fine resist features to silicon nitride via
an intermediate titanium layer
Midha, A. (Univ of Glasgow); Murad, S.K.; Weaver, J.M.R. Source:
Microelectronic Engineering, v 35, n 1-4, Feb, 1997, p 99-102 | e****o
发帖数: 165 | 2 done
Could anyone help me get the following paper, thanks. Please email me at
l*******[email protected].
Anisotropic pattern transfer of fine resist features to silicon nitride via
an intermediate titanium layer
Midha, A. (Univ of Glasgow); Murad, S.K.; Weaver, J.M.R. Source:
Microelectronic Engineering, v 35, n 1-4, Feb, 1997, p 99-102
【在 b********l 的大作中提到】
: Could anyone help me get the following paper, thanks. Please email me at
: l*******[email protected].
: Anisotropic pattern transfer of fine resist features to silicon nitride via
: an intermediate titanium layer
: Midha, A. (Univ of Glasgow); Murad, S.K.; Weaver, J.M.R. Source:
: Microelectronic Engineering, v 35, n 1-4, Feb, 1997, p 99-102
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