b*****h
发帖数: 29 | 1 need to fabricate some permalloy devices for experiment
is there any guy know something about electro-deposition?
basic concepts are welcome, handbook may be better
also if some guy is doing photolithography, please let me know how do you get
rid of the Su-8 epoxy.
some web site hang 1K for that.
Thank you for your attention. | l*****o
发帖数: 82 | 2 Electro-plating knowledgy can eazily be found in those MEMS books.
Also, in X-RAY lithography, electro-plating of Ni or Au is a standard
method for mask fabrication.
As for those photoresist, you can get rid of them using O2 plasma etching.
You can go to www.nnun.org to looking for some parameters. (From this addr,
go stanford nano center or Cornell nano center. They have basic lithograph
knowledge and receipe)
【在 b*****h 的大作中提到】
: need to fabricate some permalloy devices for experiment
: is there any guy know something about electro-deposition?
: basic concepts are welcome, handbook may be better
: also if some guy is doing photolithography, please let me know how do you get
: rid of the Su-8 epoxy.
: some web site hang 1K for that.
: Thank you for your attention.
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