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发帖数: 50 | 1 Title: Reaction of DI water and silicon and its effect on gate oxide
integrity
Author(s)
Rajagopalan, S., Mitra, U. ; Pan, S. ; Gupta, K. ; Lin, C.M. ; Sery, G. ;
Mittal, S. ; Hasserjian, K. ; Lo, W.J. ; Neubauer, G.
Published in:
Reliability Physics Symposium, 1993. 31st Annual Proceedings., International
Date of Conference: 23-25 March 1993
Page(s): 28 - 31
Meeting Date : 23 Mar 1993-25 Mar 1993
Print ISBN: 0-7803-0782-8
INSPEC Accession Number: 4647881
Conference Location : Atlanta, GA, USA
DOI: 10.1109/RELPHY.1993.283307
Publisher: IEEE
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发帖数: 70 | | s******o
发帖数: 50 | 3 Thanks and 2 baozi for you.
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